发明名称 DEPOSITON APPARATUS FOR SUBSTRATE
摘要 The present invention relates to a substrate depositing apparatus. The substrate depositing apparatus according to the present invention includes a deposition source part which evaporates or sublimates an organic material received in an inner space and sprays the evaporated or sublimated organic material to a substrate and a heating unit which is arranged near the deposition source part to heat the deposition source part and non-uniformly heats the deposition source part to remove a temperature deviation according to the inner position of the deposition source part. The substrate depositing apparatus according to the present invention forms a thin film layer with a uniform thickness on the substrate through the heating unit to non-uniformly heat the deposition source part to remove the temperature deviation according to the inner position of the deposition source part.
申请公布号 KR101520335(B1) 申请公布日期 2015.05.15
申请号 KR20140148495 申请日期 2014.10.29
申请人 SNU PRECISION CO., LTD. 发明人 MUN, JEONG IL;LEE, MYUNG SUN;MIN, SANG HONG;LEE, KWANG HYUNG;PAHK, HEUI JAE
分类号 H01L21/203;H01L21/324 主分类号 H01L21/203
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