| 摘要 |
The present invention provides a lift pin assembly. According to the present invention, the lift pin assembly comprises: lift pins; a supporting member wherein the lift pins are installed; and a cylinder unit lifting up the supporting member. The cylinder unit comprises: a hollow cylinder main body; a piston installed inside the cylinder main body to be able to move forwards and backwards; and a piston movement adjusting member installed inside the cylinder main body, and adjusting the distance of the forward and backward movement of the piston. |
