| 摘要 |
The present invention relates to an electrode array for a micromechanical component (100). The electrode array comprises: one or more first functional layers (10 EP) having electrodes (11, 11′, 12) therein; one or more second functional layers (20 VP); and one or more third functional layers (30 FP) capable of being used as an electrical conductor rail, wherein oxide materials (40) are completely removed at least locally from the third functional layers (30). |
