SILVER REFLECTORS FOR SEMICONDUCTOR PROCESSING CHAMBERS

摘要

PROBLEM TO BE SOLVED: To provide a reflector for use in a semiconductor processing chamber.SOLUTION: The reflector comprises: a reflector substrate disposed in the processing chamber to reflect radiation originating from a heating lamp 212 mounted on the semiconductor processing chamber; a reflective layer disposed on the reflector substrate and containing silver; an adhesion layer for adhesion of the reflective layer to the reflector substrate; and a diffusion barrier between the reflective layer and the reflector substrate. The diffusion barrier is selected from nickel, a nickel-chromium alloy and a chromium nitride alloy.