BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAM, AND MULTI CHARGED PARTICLE BEAM WRITING METHOD

摘要

A blanking device for multi-charged particle beams includes plural shift registers arranged in two dimensions, and plural data transmitters each configured to be arranged, where each of first shift register groups is aligned in the same row or column, in the plural shift registers arranged in two dimensions, the plural data transmitters each arranged for each of second shift register groups each obtained by grouping shift registers of one of the first shift register groups into one or more groups, wherein each of the second shift register groups is further grouped into third shift register groups each having shift registers serially connected, as plural subgroups, and each of the plural data transmitters is connected to shift registers configuring a part of shift registers serially connected in each of the third shift register groups such that all of the plural subgroups in a corresponding second shift register group are parallelly connected.

主权项

1. A blanking device for multiple charged particle beams comprising:
a plurality of shift registers configured to be arranged in two dimensions; and a plurality of data transmitters each configured to be arranged, where each of first shift register groups is aligned in a same row or a same column, in the plurality of shift registers arranged in two dimensions, the plurality of data transmitters each arranged for each of second shift register groups each obtained by grouping shift registers of any one of the first shift register groups into one or more groups wherein each of the second shift register groups is further grouped into third shift register groups each having shift registers connected in series, as a plurality of subgroups, and each of the plurality of data transmitters is connected to shift registers configuring a part of shift registers connected in series in each of the third shift register groups such that all of the plurality of subgroups in a corresponding second shift register group are connected in parallel.