发明名称 POLISHING COMPOSITION AND METHOD FOR MANUFACTURING PRINTED WIRING BOARD
摘要 <p>The present invention addresses the problem of providing a polishing composition that makes it possible to polish in a uniform manner and at a high polishing speed while sufficiently suppressing dishing when polishing a printed wiring board, and of providing a method for manufacturing a printed wiring board. This polishing composition for polishing a printed wiring board provided with an insulating layer and a copper-containing electroconductive layer contains abrasive grains, a copper complexing agent, alkylbenzenesulfonate triethanolamine, and water. The content of alkylbenzenesulfonate triethanolamine may be 0.3-5 mass%. The pH may be between 9.0 and 10.5, inclusive. The abrasive grains may be colloidal silica. A defoaming agent may be additionally contained.</p>
申请公布号 WO2015068707(A1) 申请公布日期 2015.05.14
申请号 WO2014JP79286 申请日期 2014.11.05
申请人 NITTA HAAS INCORPORATED 发明人 NISHIZAWA, HIDEAKI;MORIYAMA, KAZUKI
分类号 H05K3/26;B24B37/00;C09K3/14 主分类号 H05K3/26
代理机构 代理人
主权项
地址