发明名称 |
MOLD FOR IMPRINT, ALIGNMENT METHOD, IMPRINT METHOD, AND IMPRINT DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for imprint, an alignment method, an imprint method, and an imprint device which do not require a complicated process in manufacture of a mold, can directly and optically identify an aliment mark made of the same material as a mold material, and can perform alignment with high alignment accuracy.SOLUTION: In step and repeat type imprinting, an alignment mark on a mold side is formed in a mesa structure different from a transfer region of a mold, and is aligned not with an alignment mark on a substrate side in a transferred region to be imprinted but with the alignment mark on the substrate side in another transferred region in contact with the transferred region. |
申请公布号 |
JP2015092599(A) |
申请公布日期 |
2015.05.14 |
申请号 |
JP20140252515 |
申请日期 |
2014.12.12 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
NAGAI TAKAHARU;ICHIMURA KOJI;YOSHIDA KOJI |
分类号 |
H01L21/027;B29C33/38;B29C59/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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