SHOWER HEAD ASSEMBLY, PLASMA PROCESSING APPARATUS AND METHOD FOR MANUFACTURING A SHOWER HEAD ASSEMBLY

摘要

A shower head assembly includes an electrode plate, and a laminate base that is constituted of ceramic sheets and provided to hold the electrode plate. The laminate base includes no bonding surface between the ceramic sheets. The laminate base includes a first gas diffusion space formed in its central area and a second gas diffusion space formed in its peripheral area. A first heater electrode layer is provided above the first gas diffusion space, and a second heater electrode layer is provided above the second gas diffusion space. A first coolant passage is formed above the first gas diffusion space, and a second coolant passage is formed above the second gas diffusion space. A first gas supply passage is connected to the first gas diffusion space, and a second gas supply passage is connected to the second gas diffusion space.

主权项

1. A shower head assembly comprising:
an electrode plate; a laminate base constituted of a plurality of ceramic sheets and provided to contact and hold the electrode plate, the laminate base including no bonding surface between the ceramic sheets; a first gas diffusion space formed in a central area of the laminate base; a second gas diffusion space formed in a peripheral area of the laminate base; a first heater electrode layer provided within the laminate base and above the first gas diffusion space; a second heater electrode layer provided within the laminate base and above the second gas diffusion space; a first coolant passage formed above the first gas diffusion space and within the laminate base; a second coolant passage formed above the second gas diffusion space and within the laminate base; a first gas supply passage connected to the first gas diffusion space; and a second gas supply passage connected to the second gas diffusion space.