发明名称 |
ELECTROMAGNETIC RESONATOR PRESSURE SENSOR |
摘要 |
The invention relates to a pressure sensor including an electromagnetic resonator with waveguide having a dielectric material with a dielectric permittivity that varies with temperature. There is an excitation circuit configured to propagate an electromagnetic field through the resonator and a device for heating the resonator. There is also a device for detecting the electromagnetic resonant frequency of the resonator and a device for determining the pressure of the gas surrounding the sensor as a function of the detected resonant frequency of the resonator. |
申请公布号 |
US2015128712(A1) |
申请公布日期 |
2015.05.14 |
申请号 |
US201414534612 |
申请日期 |
2014.11.06 |
申请人 |
Commissariat à l'énergie atomique et aux énergies alternatives |
发明人 |
Mercier Denis |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Paris FR |