发明名称 ELECTROMAGNETIC RESONATOR PRESSURE SENSOR
摘要 The invention relates to a pressure sensor including an electromagnetic resonator with waveguide having a dielectric material with a dielectric permittivity that varies with temperature. There is an excitation circuit configured to propagate an electromagnetic field through the resonator and a device for heating the resonator. There is also a device for detecting the electromagnetic resonant frequency of the resonator and a device for determining the pressure of the gas surrounding the sensor as a function of the detected resonant frequency of the resonator.
申请公布号 US2015128712(A1) 申请公布日期 2015.05.14
申请号 US201414534612 申请日期 2014.11.06
申请人 Commissariat à l'énergie atomique et aux énergies alternatives 发明人 Mercier Denis
分类号 G01L9/00 主分类号 G01L9/00
代理机构 代理人
主权项
地址 Paris FR