发明名称 |
MEMS Optical Sensor |
摘要 |
The present invention relates to an all-optical sensor utilizing effective index modulation of a waveguide and detection of a wavelength shift of reflected light and a force sensing system accommodating said optical sensor. One embodiment of the invention relates to a sensor system comprising at least one multimode light source, one or more optical sensors comprising a multimode sensor optical waveguide accommodating a distributed Bragg reflector, at least one transmitting optical waveguide for guiding light from said at least one light source to said one or more multimode sensor optical waveguides, a detector for measuring light reflected from said Bragg reflector in said one or more multimode sensor optical waveguides, and a data processor adapted for analyzing variations in the Bragg wavelength of at least one higher order mode of the reflected light. |
申请公布号 |
US2015131100(A1) |
申请公布日期 |
2015.05.14 |
申请号 |
US201314405938 |
申请日期 |
2013.06.06 |
申请人 |
Technical University of Denmark |
发明人 |
Reck Kasper;Østergaard Christian;Hansen Ole;Thomsen Erik Vilain |
分类号 |
G01L1/24;G02B6/10;G01N21/55 |
主分类号 |
G01L1/24 |
代理机构 |
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代理人 |
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主权项 |
1. A sensor system comprising:
at least one multimode light source; one or more optical sensors comprising a multimode sensor optical waveguide accommodating a distributed Bragg reflector; at least one transmitting optical waveguide for guiding light from said at least one light source to said one or more optical sensors; a detector for measuring light reflected from said Bragg reflector in said one or more multimode sensor optical waveguide; and a data processor adapted for analyzing variations in the Bragg wavelength of at least one higher order mode of the reflected light. |
地址 |
Krs. Lyngby DK |