发明名称 |
A METHOD AND APPARATUS FOR IMPROVING DIFFERENTIAL DIRECT CURRENT (DC) MEASUREMENT ACCURACY |
摘要 |
<p>A method of error correction in automated test equipment (ATE) is presented. The method comprises calibrating the ATE using a calibration board, wherein the calibration board comprises a reference voltage. The calibrating comprises: (a) measuring the reference voltage using a reference channel and each of a plurality of channels in the ATE; (b) recording a series of differential voltage measurement values obtained from the measuring in a calibration module; and (c) calculating a respective correction factor for each of the plurality of channels utilizing the series of differential voltage measurement values. The method further comprises obtaining a measured voltage value for a DUT connected to a first channel in the ATE, wherein the first channel is one of the plurality of channels. Finally, the method comprises correcting the measured voltage value using a respective correction factor for said first channel.</p> |
申请公布号 |
WO2015069263(A1) |
申请公布日期 |
2015.05.14 |
申请号 |
WO2013US68961 |
申请日期 |
2013.11.07 |
申请人 |
ADVANTEST CORPORATION;NGO, THIEN |
发明人 |
NGO, THIEN |
分类号 |
G01R31/26;G01R19/165;H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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