| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect accelerations and angular velocities without suffering ill effects on detection results from an unfavorable environment of use and with high detection sensitivity.SOLUTION: A plate-shaped bridge part 720 and a plate-shaped bridge part 730 extend in a U shape from a plate-shaped member 711 fixed to the bottom plate 800 of an apparatus housing to form a cantilever beam structure to whose tip a weight body 750 is connected. In four positions, namely at the respective root ends and tips of the plate-shaped bridge part 720 and the plate-shaped bridge part 730, piezo resistance elements are arranged, and their resistance variations enable accelerations having worked in the directions of the x, y and z axes to be detected. An intermediate connecting part 725 and a weight connecting part 740 are provided with eaves structure parts 801, 802 and 803 projecting outward from flanks of the plate-shaped bridge parts 720 and 730, and these eaves structure parts, when the plate-shaped bridge parts are bent, perform the function of causing stresses to concentrate on the root ends and tips. |
