| 发明名称 |
RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL |
| 摘要 |
A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article a solid solution comprising 40-100 mol % of Y2O3, 0-50 mol % of ZrO2, and 0-40 mol % of Al2O3. |
| 申请公布号 |
US2015133285(A1) |
申请公布日期 |
2015.05.14 |
| 申请号 |
US201414531785 |
申请日期 |
2014.11.03 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
Sun Jennifer Y.;Kanungo Biraja P. |
| 分类号 |
C04B35/50;B32B38/00;C04B35/64;B32B37/14 |
主分类号 |
C04B35/50 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An article comprising:
a plasma resistant ceramic material comprising at least one solid solution, wherein the at least one solid solution comprises Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. |
| 地址 |
Santa Clara CA US |
