| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a carrier robot equipped with variable hands of four robot arms in which the four robot arms are drivable separately and which can load simultaneously or take out to-be-carried objects, e.g. substrates or wafers, loaded vertically by a specified pitch unit.SOLUTION: A carrier robot equipped with variable hands of four robot arms includes first to four robot arms 20a to 20d which are each formed with position variable block 22a to 22d inside them, arranged above, below, left and right and configured so as to move linearly in the front-back direction and first to four robot hands 21a to 21d bound each to the position variable blocks and being variable in the left-right width within a specified range. The carrier robot can take out, carry and load to-be-carried objects simultaneously or separately from specified positions to different specified positions, carry a large number of objects simultaneously, cope with individual pitches of the process equipment or cassettes and improve the process efficiency.</p> |
