COMPACT HIGH VOLTAGE RF GENERATOR USING A SELF-RESONANT INDUCTOR

摘要

RF generators including active devices driving series resonant circuits are described. The series resonant circuits include a self-resonant dual inductor. The RF generators can be used to drive capacitive loads.

主权项

1. An RF circuit for providing a radio frequency signal, the circuit comprising:
a dual inductor including one winding including an input and an output, and another winding including an input and an output; wherein the one winding and the another winding are arranged to provide, between the one winding and the another winding, a parasitic capacitance selected to determine the frequency of the radio frequency signal; and wherein the outputs of the windings are configured to electrically couple to a capacitive load.