发明名称 ULTRASONIC CLEANING APPARATUS AND ULTRASONIC CLEANING METHOD
摘要 [Problem] To reduce the amount of cleaning liquid used during cleaning of an object to be cleaned. [Solution] An ultrasonic cleaning apparatus provided with an ultrasonic transducer (11), a liquid storage part (12) provided in contact with the ultrasonic transducer, an inflow port (12a) for allowing a cleaning liquid (13) to flow into the liquid storage part, and an outflow port (12b) for allowing the cleaning liquid to flow out from the liquid storage part, a contact face (11a) at which the ultrasonic transducer contacts the cleaning liquid being disposed lower than each of the inflow port and the outflow port.
申请公布号 WO2015068543(A1) 申请公布日期 2015.05.14
申请号 WO2014JP77411 申请日期 2014.10.15
申请人 KAIJO CORPORATION 发明人 HASEGAWA HIROSHI;IMAZEKI YASUHIRO;YAKUWA SHOJI
分类号 B08B3/12;H01L21/304 主分类号 B08B3/12
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