发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
摘要 A semiconductor device with an under-bump metallurgy (UBM) over a dielectric is provided. The UBM has a trench configured to be offset from a central point of the UBM. A distance between the center of the trench to the edge of the UBM is longer than a distance between the center of the trench to the opposite edge of the UBM. A probe pin is configured to contact the UBM and collect measurement data.
申请公布号 KR20150052797(A) 申请公布日期 2015.05.14
申请号 KR20140153414 申请日期 2014.11.06
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LII MIRNG JI;TSAI HAO YI;CHEN HSIEN WEI;KUO HUNG YI
分类号 H01L21/60;H01L29/02 主分类号 H01L21/60
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