发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME |
摘要 |
A semiconductor device with an under-bump metallurgy (UBM) over a dielectric is provided. The UBM has a trench configured to be offset from a central point of the UBM. A distance between the center of the trench to the edge of the UBM is longer than a distance between the center of the trench to the opposite edge of the UBM. A probe pin is configured to contact the UBM and collect measurement data. |
申请公布号 |
KR20150052797(A) |
申请公布日期 |
2015.05.14 |
申请号 |
KR20140153414 |
申请日期 |
2014.11.06 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LII MIRNG JI;TSAI HAO YI;CHEN HSIEN WEI;KUO HUNG YI |
分类号 |
H01L21/60;H01L29/02 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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