ORIGINAL HOLDING APPARATUS, EXPOSURE APPARATUS, METHOD OF MANUFACTURING ARTICLE AND ORIGINAL HOLDING METHOD

摘要

The present invention provides an original holding apparatus which holds an original, comprising a first holding unit configured to hold the original, a second holding unit configured to hold the original, a fixing unit configured to fix the second holding unit, and an adjustment unit configured to perform adjustment of an holding force of at least one of the first holding unit and the second holding unit, wherein the adjustment unit performs the adjustment such that the holding force of the second holding unit before fixing the second holding unit is smaller than the holding force of the first holding unit before fixing the second holding unit, and performs the adjustment such that the holding force of the second holding unit after fixing the second holding unit is larger than that before fixing the second holding unit.

主权项

1. An original holding apparatus which holds an original, comprising:
a first holding unit configured to hold the original; a second holding unit, being movable with respect to the first holding unit, configured to hold the original; a fixing unit configured to fix the second holding unit with respect to the first holding unit; and an adjustment unit configured to perform adjustment of at least one of an original holding force of the first holding unit and an original holding force of the second holding unit, wherein the adjustment unit performs the adjustment such that the original holding force of the second holding unit before fixing the second holding unit by the fixing unit is smaller than the original holding force of the first holding unit before fixing the second holding unit by the fixing unit, and performs the adjustment such that the original holding force of the second holding unit after fixing the second holding unit by the fixing unit is larger than the original holding force of the second holding unit before fixing the second holding unit by the fixing unit.