| 发明名称 |
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE |
| 摘要 |
The present invention provides a drawing apparatus which performs drawing on a substrate with a charged particle beam, the apparatus comprising a deflector configured to scan the charged particle beam on the substrate, a stage configured to hold the substrate and be movable, and a controller configured to control main-scan by the deflector and sub-scan by movement of the stage, wherein the controller is configured to control a width of the main-scan based on a width of a target drawing region on the substrate in a direction of the main-scan. |
| 申请公布号 |
US2015129779(A1) |
申请公布日期 |
2015.05.14 |
| 申请号 |
US201414528192 |
申请日期 |
2014.10.30 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Morita Tomoyuki;Kikuchi Kazuya |
| 分类号 |
H01J37/20;H01J37/30;G21K5/10 |
主分类号 |
H01J37/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A drawing apparatus which performs drawing on a substrate with a charged particle beam, the apparatus comprising:
a deflector configured to scan the charged particle beam on the substrate; a stage configured to hold the substrate and be movable; and a controller configured to control main-scan by the deflector and sub-scan by movement of the stage, wherein the controller is configured to control a width of the main-scan based on a width of a target drawing region on the substrate in a direction of the main-scan. |
| 地址 |
Tokyo JP |
