| 摘要 |
A pressure sensor comprises a first substrate (1) and a cap (4) attached to the first substrate (1). The cap (4) includes a processing circuit (241), a cavity (41), a deformable membrane (42) for separating the cavity (41), and a port open to the outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane (42) to pressure at the port into a signal capable of being processed by the processing circuit (241). The cap (4) is attached to the first substrate (1) such that the deformable membrane (42) faces the first substrate (1) and such that a gap (6) for contributing to the port is provided between the deformable membrane (42) and the first substrate (1). The first substrate (1) comprises: a support portion (7) to which the cap (4) is attached; a contact portion (8) for electrically connecting the pressure sensor to an external device; and one or more suspension elements (9) for suspending the support portion (7) from the contact portion (8). |
