发明名称 SEMIPOLAR NITRIDE SEMICONDUCTOR STRUCTURE AND METHOD OF FABRICATING THE SAME
摘要 Disclosed is a semi-polar nitride semiconductor structure and a method of fabricating the semi-polar nitride semiconductor structure. The disclosed semi-polar nitride semiconductor structure comprises a nitride semiconductor layer which is formed on a silicon board that has a Si (11k) surface that is within a 7<=k<=13 range, and shows a polarization electric field that is close to 0.
申请公布号 KR20150052465(A) 申请公布日期 2015.05.14
申请号 KR20130133820 申请日期 2013.11.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JUN YOUN;KIM, JAE KYUN;KIM, JOO SUNG;PARK, YOUNG SOO;TAK, YOUNG JO
分类号 H01L33/16;H01L21/02;H01L33/02 主分类号 H01L33/16
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