| 摘要 |
An apparatus for generating plasma according to an embodiment of the present invention comprises: an exhaust pipe which connects a reaction chamber and a vacuum pump; at least one bypass pipe which is connected to the exhaust pipe at the first location of the upstream and at the second location of the downstream; and a plasma reactor which is linked to the bypass pipe. The apparatus dramatically lowers PFC gas emission by decomposing PFC gas and cleanses byproducts aggregated in vacuum lines during production with the use of the decomposed PFC radicals, thus leading to an enhanced performance and life of equipment and increased product yield. |
