MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

摘要

A micromechanical component is described having a first substrate that has a first front side a first rear side facing away from the first front side; first printed conductors that are fashioned on the first front side of the first substrate; a plurality of actuator devices that are fashioned on and/or in the first substrate and that are electrically bonded to the first printed conductors, the actuator devices each having at least one stator electrode and each having at least one actuator electrode that works together with the at least one stator electrode, which are fashioned such that a voltage can be applied between the actuator electrode and cooperating stator electrode in such a way that the actuator electrode can be displaced relative to the stator electrode

主权项

1. A micromechanical component, comprising:
a first substrate having a first front side and a first rear side facing away from the first front side; a plurality of first printed conductors that are fashioned on the first front side of the first substrate; a plurality of actuator devices that are fashioned at least one of on and in the first substrate and that are electrically bonded to the first printed conductors, wherein each actuator device includes:
at least one stator electrode, andat least one actuator electrode that works together with the at least one stator electrode, each actuator device being fashioned such that a voltage can be applied between the at least one actuator electrode and the at least one cooperating stator electrode in such a way that the at least one actuator electrode can be displaced relative to the at least one stator electrode; a plurality of second printed conductors that are fashioned on the first rear side of the first substrate and are electrically connected to the first printed conductors; and at least one control ASIC fastened at least one of to, over, and on the first rear side of the first substrate and electrically bonded to the second printed conductors in such a way that the voltage that can be applied between the at least one actuator electrode and the at least one cooperating stator electrode of each actuator device can be controlled by the at least one control ASIC.