MANUFACTURING ELECTROCHEMICAL SENSOR MODULES

摘要

Certain processes for manufacturing an electrochemical sensor module include etching a Silicon wafer to form precursor sensor bodies, disposing sensor fibers along rows of the precursor sensor bodies, securing a rigid layer over the sensor fibers, dividing the wafer, rigid layer, and sensor fibers into individual precursor sensor bodies, and joining each precursor sensor body to a component body to form sensor modules.

主权项

1. A method of installing sensors in sensor modules, the method comprising:
providing a first wafer and a continuous length of at least a first composite sensor fiber; removing material from the first wafer to form features of a plurality of precursor sensor bodies; disposing at least the first composite sensor fiber across the features of the precursor sensor bodies; coupling a rigid body to the first wafer; separating the coupled first wafer and rigid body into a plurality of precursor sensor bodies by cutting the first wafer, the rigid body, and the first composite sensor fiber into segments.