ARC CHAMBER WITH MULTIPLE CATHODES FOR AN ION SOURCE

摘要

An apparatus for extending the useful life of an ion source, comprising an arc chamber containing a plurality of cathodes to be used sequentially and a plurality of repellers to protect cathodes when not in use. The arc chamber includes an arc chamber housing defining a reaction cavity, gas injection openings, a plurality of cathodes, and at least one repeller element. A method for extending the useful life of an ion source includes providing power to a first cathode of an arc chamber in an ion source, operating the first cathode, detecting a failure or degradation in performance of the first cathode, energizing a second cathode, and continuing operation of the arc chamber with the second cathode.

主权项

1. An apparatus for extending the useful life of an ion source comprising:
an arc chamber having a reaction cavity; a repeller pivotally mounted to rotate from a first position extending across the reaction cavity to a second position not extending across the reaction cavity; and a first cathode, configured to be covered by the repeller when the repeller is in the first position.