| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reliably and safely perform efficient treatment of a polymer of chlorosilanes generated in a process for producing polycrystalline silicon or in another process. <P>SOLUTION: This invention relates to a polymer treating apparatus 10 for treating a polymer comprising chlorosilanes, and the polymer treating apparatus 10 includes: a treatment tank 20 having a liquid tank section 22 holding treat water W1 for hydrolysis and a sprinkling tower 24 connected to an upper part of the liquid tank section 22; an inert gas supply means 70 to supply an inert gas into the treatment tank 20; a gas guide tower 40 connected to an upper part of the sprinkling tower 24 and having an opening 40a which is opened downward; and a water seal tank 50 holding seal water W2, wherein the opening 40a of the gas guide tower 40 is stored in the seal water W2, thereby the internal gas in the sprinkling tower 24 of the treatment tank 20 and in the gas guide tower 40 is water-sealed by the treatment tank 20 and the water seal tank 50, and the inert gas is supplied into the treatment tank 20 by the inert gas supply means 70, so that the inside of the treatment tank 20 and the gas guide tower 40 is maintained under positive pressure. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
