| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sensor which facilitates reduction of power consumption and has high sensitivity. <P>SOLUTION: A sensor 1 comprises: a piezoelectric plate 2 which is formed into a plate shape extending in one direction from a base side to a tip side, with the base side being a fixed end and the tip side being a free end; an IDT 3 which is formed on a principal surface 2a of the piezoelectric plate and excites a SAW and propagate it on the principal surface; and a columnar part 4 which is disposed on the principal surface of the piezoelectric plate at the tip side in a protruding manner and tilts by an influence exerted from outside. The piezoelectric plate flexibly deforms in a direction perpendicular to the principal surface as the columnar part tilts. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
