| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a galvano scanning device achieving highly-accurate positioning of optical beam even in an environment of temperature change. <P>SOLUTION: A galvano scanning device comprises: an X-axis galvano scanner 3a that rotates a mirror 4a; a Y-axis galvano scanner 3b that has a rotation axis 17b perpendicular to a rotation axis 17a of the mirror 4a and rotates a mirror 4b; an acceleration sensor 16a that is provided at the mirror 4a and detects tilt vibration of the mirror 4a; an acceleration sensor 16b that is provided at the mirror 4b and detects tilt vibration of the mirror 4b; and a control unit 2 that controls a rotation angle of the mirror 4b based on a detected value by the acceleration sensor 16a and controls a rotation angle of the mirror 4a based on a detected value by the acceleration sensor 16b. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
