| 摘要 |
A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing processing tool and comprises: a porous sleeve at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber; and an electrical energy device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve which heats the treatment materials as they pass through the porous sleeve into the treatment chamber. In this way, electrical energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This provides for greater flexibility in the use of such burners since the burner can be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber, enables significantly more energy to be imparted into the treatment materials as they transit through the porous sleeve. |
