| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a low loss optical waveguide capable of avoiding crystallization of a core glass by heat treatment and a method for manufacturing the same. <P>SOLUTION: A quartz based optical waveguide comprises: a substrate; an under clad layer consisting of quartz based glass deposited on the substrate; a core consisting of quartz based glass, deposited on the under clad layer and having light propagation effect; a first over clad layer consisting of quartz based glass and deposited on the core and the under clad layer; and one or two over clad layers consisting of quartz based glass and deposited on the first over clad layer. After the first over clad layer is formed, the first over clad layer is heat-treated at 1100°C or more and 1400°C or less before the one or two over clad layers are formed. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
