METHOD FOR MEASURING HARDNESS OF THIN FILM

摘要

Disclosed is a method for measuring the hardness of a thin film. The method for measuring hardness of the thin film comprises the steps of: providing a substrate in which the thin film is formed; forming a surface layer on the thin film; recognizing the surface layer by a test tip; applying the weight to the test tip so that the test tip penetrates the surface layer and is located inside the thin film; and calculating the hardness of the thin film by using identation depth of the test tip to the weight applied to the test tip, and the thin film.