| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor improving detection sensitivity without upsizing thickness dimensions of a weight unit and lightening the weight unit. <P>SOLUTION: The acceleration sensor includes a sensor unit comprising the weight units 4, 5 where recesses 41, 51 and full units 40, 50 are formed integrally, a pair of beam units 6a, 6b, 7a, 7b, movable electrodes 4a, 5a, and first fixed electrodes 20a, 21a and second fixed electrodes 20b, 21b, and detects acceleration from a change in capacitance between the movable electrodes 4a, 5a and the fixed electrodes 20a, and the like following rotation of the weight units 4, 5 with straight lines connecting pair of beam units 6a, 6b and 7a, 7b as the axes of rotation. The beam units 6a, 6b, 7a, 7b are shifted to the sides of the recesses 41, 51 for disposition, such that an angle formed by a perpendicular line drawn from the center-of-gravity positions of the weight units 4, 5 to the axes of rotation and the surfaces of the movable electrodes 4a, 5a becomes nearly 45 degrees. <P>COPYRIGHT: (C)2011,JPO&INPIT |
