| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a scattering-body switching device capable of avoiding increase in size, turbulence of irradiation and a collision between scattering bodies, so as to accurately replacing the scattering bodies. <P>SOLUTION: The scattering-body switching device includes: a vacuum chamber 42 housing a plurality of scattering bodies 2; a drive mechanism 3 which has drive rods 3b each extending into the vacuum chamber 42 toward a center axis X<SB POS="POST">42</SB>from different directions outside the vacuum chamber 42 on a first plane vertical to the center axis X<SB POS="POST">42</SB>and having the scattering bodies 2 connected to the leading end thereof, thereby linearly driving the scattering bodies 2 to either of a use position or a retracted position separated from the use position; and stoppers 5 connected to the drive rods 3b corresponding to the respective scattering bodies 2 for cooperating with the scattering bodies, so as to prevent the collision of the scattering body with the other scattering body. The respective drive regions of the stoppers 5 are set outside the vacuum chamber 42 parallel to the first plane and separated from the center axis X<SB POS="POST">42</SB>. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
