发明名称 パルス式の不連続火花放電を作動させる方法、陰極火花蒸着を作動させる方法及び基板をコーティングする方法
摘要 <p>The invention relates to a method for operating a pulsed discontinuous spark discharge. The spark is fed via a capacitor. Between the pulses there are switched-off time intervals during which no spark current flows. Within the pulses, that is to say during the switched-on time intervals, the supply of charge is stopped upon a current threshold being reached and is restarted, with the result that subpulses occur within the pulses. The time intervals and subpulses are chosen according to the invention such that when the capacitor is switched on again, the spark discharge readily ignites again.</p>
申请公布号 JP5716129(B2) 申请公布日期 2015.05.13
申请号 JP20140504194 申请日期 2012.03.26
申请人 发明人
分类号 H05H1/46;C23C14/06;C23C14/34 主分类号 H05H1/46
代理机构 代理人
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