Small scale measurements of anisotropic sheet conductances

摘要

In a method of determining a pair of spatial components of an anisotropio sheet conductance of a conductive sheet (52) with a multi-point probe (30), the conductive sheet has an edge (56) and defines an axis of highest conductance and an axis of lowest conductance. The multi-point probe comprises a plurality of contact elements (32-38), and each contact element defines a contact point (42-48) for contacting and establishing an electrical connection to the conductive sheet. The contact points of the plurality of contact elements are spatially separated from one another and positioned in a collinear relationship. The method comprises determining a first parameter value representing the spatial separation between the contact points, contacting the conductive sheet with the contact points of the plurality of contact elements at a first position on the conductive sheet, determining a second parameter value representing the distance between the first position and the edge of the conductive sheet, selecting a first and a second pair of contact elements from the plurality of contact elements, performing a first four-point measurement with the first pair of contact elements as current leads and the second pair of contact elements as voltage leads for determining a resistance value defining a third parameter value, defining a first quantity and a second quantity representing the conductance of the conductive sheet along the axis of highest conductance and representing the conductance of the conductive sheet along the axis of lowest conductance, respectively, defining a model describing a relation between the first and second quantities and the first, second, and third parameter values, and determining the first and/or the second quantities by employing the first, second, and third parameter values in the model.