Sputter ion vacuum pump apparatus,申请号GB19610003148-传众专利搜索

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发明名称	Sputter ion vacuum pump apparatus
摘要
申请公布号	GB910608(A)	申请公布日期	1962.11.14
申请号	GB19610003148	申请日期	1959.07.23
申请人	VARIAN ASSOCIATES	发明人
分类号	H01J41/20	主分类号	H01J41/20
代理机构		代理人
主权项
地址

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