发明名称 DEVICE AND METHOD FOR HEAT TREATING AN OBJECT
摘要 <p>The present invention relates to a device for heat treating an object, in particular a coated substrate, with an in particular gas-tightly sealable housing that encloses a hollow space, wherein the hollow space has a separating wall, by which the hollow space is divided into a process space for accommodating the object and an intermediate space, wherein the separating wall has one or a plurality of openings, which are implemented such that the separating wall acts as a barrier for the diffusion out of the process space into the intermediate space of a gaseous substance generated in the process space by the heat treatment of the object. The housing has at least one housing section coupled to a cooling device for its active cooling, wherein the separating wall is arranged between the object and the coolable housing section. The invention further relates to the use of a separating wall as a diffusion barrier in a device for heat treating an object as well as a corresponding method for heat treating an object.</p>
申请公布号 EP2870624(A1) 申请公布日期 2015.05.13
申请号 EP20130735263 申请日期 2013.07.09
申请人 SAINT-GOBAIN GLASS FRANCE 发明人 FÜRFANGER, MARTIN;JOST, STEFAN;PALM, JÖRG
分类号 H01L21/673 主分类号 H01L21/673
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