SINGLE CRYSTALLINE INGOTS, METHOD AND APPARATUS FOR MANUFACTURING THE INGOTS

摘要

The present invention relates to a method for manufacturing a monocrystalline ingot, which is performed by an apparatus for manufacturing a monocrystalline ingot, comprising: a crucible accommodating a melted solution; a pulling and driving unit pulling a seed crystal while rotating the seed crystal in contact with the melted solution so as to grow a monocrystalline ingot; and a crucible driving unit rotating the crucible, wherein the method comprises a step of minimizing a change in a flow rate of the melted solution flowing in a vertical lower portion of the single crystal ingot during the growing of the monocrystalline ingot, and reducing oxygen concentration variation in a radial direction in a horizontal section of the single crystal ingot.