| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for decomposing and discharging an ozone mixture, the method restraining ozone from being condensed beyond its lower explosion limit value in simple and compact-sized equipment in a process which treats a fluid including ozone; and to provide a device for decomposing and discharging an ozone mixture. <P>SOLUTION: When a mixture fluid of ozone and an inert gas having a low boiling point is urgently discharged, the mixture fluid is stored in a first liquid-reception tank 23 in which an inert gas having a high boiling point is preliminarily stored, and then the mixture fluid and the inert gas having a high boiling point are mixed together to introduce them into an ozone-decomposing tank 27. At that time, in order to prevent the temperature in the ozone-decomposing tank 27 from suddenly rising, an adequate amount of the inert gas having a high boiling point is mixed with the mixture fluid introduced into the ozone-decomposing tank 27. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
