セラミック膜の堆積方法

摘要

The present invention is concerned with methods for the deposition of ceramic films on ceramic or metallic surfaces, particularly the deposition of sub-micron thickness ceramic films such as films of stabilised zirconia and doped ceria such as CGO (cerium gadolinium oxide). The present invention is particularly useful in the manufacture of high and intermediate temperature operating fuel cells including solid oxide fuel cells (SOFC) and also metal supported intermediate temperature SOFC operating in the 450-650° C. range.