| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high reliability and yield method for manufacturing a semiconductor waveguide array element. <P>SOLUTION: The method for manufacturing a semiconductor waveguide array element includes: an optical waveguide forming step of forming a plurality of parallel trench grooves in a semiconductor laminate structure having a slab optical waveguide to form ridge optical waveguides spaced by the trench grooves into an array; an application step of applying an organic insulating material to cover the surface of the semiconductor laminate structure with the ridge optical waveguides formed and to fill the plurality of trench grooves; an etching step of wet-etching the organic insulating material to expose upper portions of the ridge optical waveguides arrayed; and a heat treatment step of hardening the organic insulating material filling the plurality of trench grooves. In the optical waveguide forming step, outermost trench grooves in outermost positions of the plurality of trench grooves have a greater width than inner trench grooves situated inside the outermost trench grooves. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
