发明名称 半導体素子用基板の処理方法
摘要 <p>To provide a processing method of a substrate for semiconductor elements, for applying blast processing to a substrate having a first surface and a second surface opposite to the first surface. The processing method includes a step of applying the blast processing to the second surface opposite to the first surface on which a compound semiconductor film is formed or is to be formed.</p>
申请公布号 JP5716834(B2) 申请公布日期 2015.05.13
申请号 JP20130532763 申请日期 2012.01.23
申请人 发明人
分类号 B24C1/00;B23K26/00;B23K26/38;B24C11/00;H01L21/301;H01L21/304 主分类号 B24C1/00
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