发明名称 ポジ型感光性樹脂組成物、硬化膜の形成方法、硬化膜、液晶表示装置、及び、有機EL表示装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition that can give a cured film having high sensitivity, high durability against a stripping solution or NMP, good adhesiveness to a transparent electrode film or metal, and excellent dry etching durability, and hardly causing problems in display even in a display device. <P>SOLUTION: The positive photosensitive resin composition comprises: (component A) a copolymer having at least (a1) a structural unit having a residue of an acid group protected by an acid decomposable group and (a2) a structural unit having a crosslinking group; (component B) a copolymer having no structural unit having a residue of an acid group protected with an acid decomposable group but having at least (b1) a structural unit having an acid group and (b2) a structural unit having a crosslinking group; (component C) a photo-acid generator; and (component D) a solvent. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5715967(B2) 申请公布日期 2015.05.13
申请号 JP20120001623 申请日期 2012.01.06
申请人 富士フイルム株式会社 发明人 霜山 達也;川島 敬史;山▲崎▼ 健太;疋田 政憲
分类号 G03F7/039;G02F1/1333;G03F7/004;H01L21/027 主分类号 G03F7/039
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