Product having functional layer and method for fabricating the same

摘要

A product having a functional layer and a method for fabricating the same. A method for fabricating a product having a functional layer includes the step of conducting a plasma reaction with titanium and silicon precursor compounds to form a coating on a substrate, such as a heat exchanger surface.

主权项

1. A method for fabricating a product having a functional layer comprising the steps of:
conducting a plasma reaction on a substrate, wherein precursor compounds are supplied for the plasma reaction; wherein the precursor compounds are selected from the group consisting of: (1) titanium isopropoxide and/or titanium hydroxide, (2) silicon alkoxide, elemental silicon and/or silicon hydroxide, and (3) a carboxylic acid RCOOH with R being represented by the formula CnH2n+1 and n being in the range of 1 to 3; and wherein the plasma reaction forms a functional layer on the substrate comprising titanium and silicon as components thereof, wherein a number of esterification reactions is determined for the amount of remaining titanium isopropoxide to be less than 10% by mass, and wherein the substrate is a surface of a heat exchanger.