Method for thermal stabilization of probe card and inspection apparatus

摘要

In a method for thermal stabilization of a probe card, a probe card is adjusted to a prescribed temperature in a short time by making a heat source directly contact the probe card and is accurately determined whether the probe card is thermally stable. A heat transfer substrate is mounted on a mounting table. The temperature of the heat transfer substrate is adjusted through the mounting table. The mounting table is raised, and a plurality of probes is brought into contact with the heat transfer substrate at a prescribed target load. The contact load between the heat transfer substrate and the probes, which changes according to the thermal changes in the probe card, is detected. The mounting table is controlled vertically through a vertical drive mechanism such that the contact load becomes the target load until the probe card is thermally stable.

主权项

1. A method for thermal stabilization of a probe card by using an inspection apparatus including: a horizontally and vertically movable mounting table; a probe card having a plurality of probes, disposed above the mounting table; a vertical drive mechanism configured to vertically move the mounting table; a temperature control unit configured to control a temperature of the mounting table; and a control unit configured to control the vertical drive mechanism and the temperature control unit, wherein before inspecting electrical characteristics of an inspection target at a predetermined temperature, the probe card is thermally stabilized by mounting a heat transfer substrate on the mounting table, adjusting the probe card to a predetermined temperature through the heat transfer substrate on the mounting table of which temperature is adjusted by the temperature control unit, and controlling a contact load between the heat transfer substrate and the probes to a predetermined target load by vertically moving the mounting table through the vertical drive mechanism, the method comprising:
a first step of mounting the heat transfer substrate on the mounting table and adjusting a temperature of the heat transfer substrate through the mounting table; a second step of bringing the heat transfer substrate into contact with the probes at a predetermined target load by raising the mounting table; a third step of detecting the contact load between the heat transfer substrate and the probes which changes in conformity with thermal changes in the probe card that exchanges heat with respect to the heat transfer substrate; and a fourth step of controlling vertical movement of the mounting table through the vertical drive mechanism such that the contact load becomes equal to the predetermined target load, until the probe card is thermally stabilized.