Apparatus to control an ion beam

摘要

An apparatus to control an ion beam includes a scanner configured in an first state to scan the ion beam wherein the scanner outputs the ion beam as a diverging ion beam; a collimator configured to receive along a side of the collimator the diverging ion beam and to output the diverging ion beam as a collimated ion beam; a beam adjustment component that extends proximate the side of the collimator; and a controller configured to send a first signal when the scanner is in the first state to the beam adjustment component to adjust ion trajectories of the diverging ion beam from a first set of trajectories to a second set of trajectories.

主权项

1. An apparatus to control an ion beam, comprising:
a scanner configured in a first state to scan the ion beam wherein the scanner outputs the ion beam as a diverging ion beam having a first divergence angle and configured in a second state to transmit the ion beam as a ribbon beam having a set of ribbon beam trajectories that define a second divergence angle without scanning the ion beam; a collimator configured to receive along a side of the collimator the diverging ion beam and to output the diverging ion beam as a collimated ion beam; a beam adjustment component that extends proximate the side of the collimator, the beam adjustment component comprising a plurality of current coils that are positioned along a length of the beam adjustment component; and a controller configured to send a first signal when the scanner is in the first state to the beam adjustment component to adjust ion trajectories of the diverging ion beam from a first set of trajectories to a second set of trajectories that define a third divergence angle, wherein the second set of trajectories more closely matches the ribbon beam trajectories than the first set of trajectories, wherein the third divergence angle more closely matches the second divergence angle than the first divergence angle.