Resonator structures and method of making

摘要

A resonator in the Swiss-roll structure, method of making the resonator structure and the system employing the resonator are disclosed. The resonator includes a plurality of layers, including a ceramic layer and a metallic layer. The ceramic and metallic layers are configured in a Swiss-roll form such that the neighboring ceramic layers are separated by the metallic layer. Further, the ceramic layer includes materials that have a dielectric constant of at least about 10 and dielectric loss tangent less than about 0.01 in the frequency range of about 1 KHz to about 100 MHz. The method of forming the resonator includes the steps of disposing a metallic layer, depositing a dielectric ceramic layer, and forming a Swiss-roll structure of the metallic and ceramic layers. Alternate method includes swaging the dielectric material filled metal tubes and forming into Swiss-rolls. Further steps include heat treating the resultant Swiss-roll structure in vacuum, inert atmosphere, or reducing atmosphere to form a monolithic Swiss-roll structure, such that the air gap between turns of the Swiss-roll structure is less than about 1 μm.

主权项

1. A method of forming a resonator, comprising:
disposing a metallic layer; providing a buffer layer over the metallic layer; depositing a dielectric ceramic layer over the buffer layer; forming a Swiss-roll structure of the metallic layer and the ceramic layer; and heat treating the Swiss-roll structure in a vacuum, inert atmosphere, or reducing atmosphere to form a monolithic Swiss-roll structure, wherein an air gap between turns of the Swiss-roll structure is less than about 1 μm.