Nozzle and a substrate processing apparatus including the same

摘要

A nozzle of a nozzle device includes an arm pipe that extends in a horizontal direction and a downstream pipe formed so as to curve downward from one end of the arm pipe. In the nozzle, a metallic pipe is provided inside a second resin pipe. Moreover, a first resin pipe is provided inside the metallic pipe. A boss is attached to the tip of the metallic pipe between the first resin pipe and the second resin pipe. At the tip of the nozzle, an outer peripheral surface of the first resin pipe, an end surface of the second resin pipe and an end surface of the boss are welded by welding resin. In this way, the metallic pipe is reliably coated with the first resin pipe, the second resin pipe, the boss and the welding resin.

主权项

1. A nozzle supported by a supporting member for supplying a processing liquid downward onto a substrate, comprising:
a first resin pipe made of a resin material, through which said processing liquid flows; a metallic pipe made of a metallic material and provided to cover an outer periphery of said first resin pipe; and a second resin pipe made of a resin material and provided to cover an outer peripheral surface of said metallic pipe, wherein said first resin pipe, said metallic pipe and said second resin pipe constitute (1) an arm pipe having a first end where the processing liquid is received, and a second end, and extending in a horizontal direction, and (2) a downstream pipe extending so as to curve downward from the second end of said arm pipe, and said downstream pipe has on an end thereof a discharge port that discharges said processing liquid flowing from said first end to said second end of said arm pipe within said first resin pipe, and an end of said first resin pipe projects downward from an end of said second resin pipe.