Vibrator element, sensor unit, electronic apparatus, manufacturing method of vibrator element, and manufacturing method of sensor unit

摘要

A vibration gyro device has a base part and a pair of drive vibrating arms and a pair of detection vibrating arms respectively extended from both ends in a Y-axis direction of the base part. Further, adjustment vibrating arms extended from respective ends of connecting parts respectively extended from both ends in an X-axis direction of the base part in parallel to the drive vibrating arms are provided. At the end sides of the respective adjustment vibrating arms, spindle parts as wider parts are provided. On principal surfaces of the respective adjustment vibrating arms, adjustment electrodes as membranes for adjustment of leakage output of the vibration gyro device are provided.

主权项

1. A vibrator element comprising:
a base part; a first vibrating arm and a second vibrating arm extended from the base part; an adjustment part provided on the second vibrating arm; and an output signal of the second vibrating arm being at an opposite phase to an output signal of leakage vibration of the first vibrating arm.