发明名称 |
Microelectromechanical systems (MEMS) resonators and related apparatus and methods |
摘要 |
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer. |
申请公布号 |
US9030080(B2) |
申请公布日期 |
2015.05.12 |
申请号 |
US201213681893 |
申请日期 |
2012.11.20 |
申请人 |
Sand 9, Inc. |
发明人 |
Chen David M.;Kuypers Jan H.;Mohanty Pritiraj;Schoepf Klaus Juergen;Zolfagharkhani Guiti;Goodelle Jason;Rebel Reimund |
分类号 |
H01L41/053;H03H3/007;H03H9/02;B81B3/00;H02N1/00;H03H9/24 |
主分类号 |
H01L41/053 |
代理机构 |
Wolf, Greenfield & Sacks, P.C. |
代理人 |
Wolf, Greenfield & Sacks, P.C. |
主权项 |
1. A capped microelectromechanical systems (MEMS) resonator, comprising:
a piezoelectric microelectromechanical systems (MEMS) resonating structure formed on a first wafer, the piezoelectric MEMS resonating structure comprising a resonating body including a piezoelectric material active layer and a layer of silicon; and a cap wafer capping the piezoelectric MEMS resonating structure, wherein the cap wafer comprises no integrated circuitry, wherein the cap wafer comprises an integrated heater. |
地址 |
Cambridge MA US |